Beam stabilization system developed by Shinopto has independent intellectual property rights.The system is based on the sampling of two points of the laser beam to achieve 4 freedoms adjustment in space. The system could feedback the position errors by PSD to control the Nanomotors, in this way, the beam position and direction in space can be a constant. The system is divided into two categories:scientific grade beam stabilization system (model: S - LBS1000 - R) and industrial-grade beam stabilization system (model S - LBS1000 - I).The former is based on the company's newly developed piezo actuator Nanomotor SNM01,The latter is based on the company's fast piezo-drive optical mount SNM03.The response speed is 10 times faster than that of the Nanomotor used in the research level beam stabilization system. Due to the small size and high resolution of the Nanomotor as well as the position maintain character under power off status, Nanomotor is very suitable for the adjustment of the optical system.besides this, Nanomotor is also be used in the vacuum,ultraviolet, and other application environments.At present,Nanomotor is widely used to control the laser pointing drift, it can significantly improve the accuracy of the system.Its applications include the measurement, exposure control, beam tracking of the manufacturing process of semiconductor wafer and so on.At the same time, it is widely used in the field of scientific research,such as laser cavity adjustment, crystal phase matching,

Crystal displacement in laser, polarization adjustment, thin film measurement system, wafer pattern detection, etc.

                   Scientific grade beam stabilization system (model: S - LBS1000 - R)

Scientific grade beam stabilization system (model: S - LBS1000 - R) Software control interface

         Industrial-grade beam stabilization system (model S - LBS1000 - I)

             Industrial-grade beam stabilization system (model S - LBS1000 - I) Software control interface

In this system,The laser beam passes through two mirrors M1 and M2 to reach the working area,each reflector is equipped with two real-time adjustment positions Nanomotor.meanwhile,insert two light splitter in optical path,Each piece of light splitter is reflected in a small number of light to the photosensitive surface of the PSD1 and PSD2.In ideal status,The beam of PSD1 should be correlated with the spot on the M2 mirror,PSD1 signal is used to control the M1 mirror, so as to ensure that the spot on the M2 position is constant.After the spot position is fixed, the M2 is used to adjust the laser beam direction,after PSD2 detection beam deviation,Drive M2 to ensure that the beam output center.The two PSD reference points, so as to determine a straight line in space. Finally,the output light beam is stabilized on a straight line, and the beam direction and position are constant.